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SPHERICAL ABERRATION CORRECTION ELECTROSTATIC LENS, INPUT LENS, ELECTRON SPECTROSCOPIC DEVICE, PHOTOELECTRON MICROSCOPE, AND MEASUREMENT SYSTEM
SPHERICAL ABERRATION CORRECTION ELECTROSTATIC LENS, INPUT LENS, ELECTRON SPECTROSCOPIC DEVICE, PHOTOELECTRON MICROSCOPE, AND MEASUREMENT SYSTEM
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机译：球面像差校正静电透镜，输入透镜，电子分光器件，光电子显微镜和测量系统
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摘要
A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.
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