EFFICIENT HIGH-HARMONIC-GENERATION-BASED EUV SOURCE DRIVEN BY SHORT WAVELENGTH LIGHT

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  机译： 短波长光驱动的高效高谐波产生EUV光源

• 4. EFFICIENT HIGH-HARMONIC-GENERATION-BASED EUV SOURCE DRIVEN BY SHORT WAVELENGTH LIGHT [P] . 世界知识产权组织专利： WO2011139303A2 . 2011-11-10

  机译： 短波长光驱动的高效基于高生热的EUV源

• 5. Efficient High-Harmonic-Generation-Based EUV Source Driven by Short Wavelength Light [P] . 美国专利： US2011140009A1 . 2011-06-16

  机译： 短波长光驱动的基于高谐波产生的高效EUV源

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