首页> 外国专利> Integrated circuit including gate electrode level region including at least three linear-shaped conductive structures of equal length having aligned ends and positioned at equal pitch and forming multiple gate electrodes of transistors of different type

Integrated circuit including gate electrode level region including at least three linear-shaped conductive structures of equal length having aligned ends and positioned at equal pitch and forming multiple gate electrodes of transistors of different type

机译:包括栅电极级区域的集成电路,该栅电极级区域包括至少三个相等长度的线性导电结构,该线性导电结构具有对齐的端部并且以相等的间距定位并且形成不同类型的晶体管的多个栅电极

摘要

A cell of a semiconductor device is disclosed to include a diffusion level including a plurality of diffusion regions separated by inactive regions. The cell also includes a gate electrode level including a number of conductive features defined to extend in only a first parallel direction. Each of the conductive features within the gate electrode level is fabricated from a respective originating rectangular-shaped layout feature. The gate electrode level includes conductive features defined along at least four different virtual lines of extent in the first parallel direction. A width of the conductive features within the gate electrode level is measured perpendicular to the first parallel direction and is less than a wavelength of light used in a photolithography process to fabricate the conductive features. The cell also includes a number of interconnect levels formed above the gate electrode level.
机译:公开了一种半导体器件的单元,该单元包括扩散水平,该扩散水平包括被非活性区域分开的多个扩散区域。该单元还包括栅电极层,该栅电极层包括被限定为仅在第一平行方向上延伸的多个导电特征。栅电极级内的每个导电特征由各自的始发矩形布局特征制成。栅电极级包括沿第一平行方向上的至少四个不同的虚拟延伸线限定的导电特征。垂直于第一平行方向测量栅电极级内的导电特征的宽度,并且该宽度小于在光刻工艺中用于制造导电特征的光的波长。该单元还包括形成在栅电极水平上方的多个互连水平。

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