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Fabrication method of topographically modulated microstructures using pattern homogenization with UV light

机译:利用紫外光图案均质化制造经地形调制的微结构的方法

摘要

A method for microfabrication of a microfluidic device having sub-millimeter three dimensional relief structures is disclosed. In this method, homogeneous surfaces, which do not exhibit apparent pixel geometry, emerge from the interaction of the overlapping of diffracted light under opaque pixels and the nonlinear polymerization properties of the photoresist material. The method requires a single photolithographic step and allows for the fabrication of microstructures over large areas (centimeters) with topographic modulation of features smaller than 100 micrometers. The method generates topography that is useful in a broad range of microfluidic applications.
机译:公开了一种用于微制造具有亚毫米三维浮雕结构的微流体装置的方法。在这种方法中,不透明的像素下的衍射光的重叠与光致抗蚀剂材料的非线性聚合特性的相互作用产生了不表现出明显的像素几何形状的均匀表面。该方法只需要一个光刻步骤,就可以在大面积(厘米)范围内以小于100微米的特征进行形貌调制来制造微结构。该方法产生的形貌可用于多种微流体应用。

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