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Hybrid TCS-siemens process equipped with 'turbo charger' FBR; method of saving electricity and equipment cost from TCS-siemens process polysilicon plants of capacity over 10,000 MT/YR
Hybrid TCS-siemens process equipped with 'turbo charger' FBR; method of saving electricity and equipment cost from TCS-siemens process polysilicon plants of capacity over 10,000 MT/YR
A ‘hybrid’ TCS (Trichlorosilane)-Siemens process is provided to save electricity and initial investment cost from TCS synthesizing process and silicon tetrachloride to TCS converting process in a TCS-Siemens polysilicon plant, whose size is over 10,000 MT/YR of polysilicon. The ‘hybrid’ TCS-Siemens process of the current application is equipped with one direct chlorination FBR (Fluidized Bed Reactor) and one hydro-chlorination FBR. Three different TCS-Siemens processes are compared based on mass balance calculation. The hybrid TCS-Siemens process saves at least 78,000,000Kwhr/year of electricity from TCS generation only from a 10,000 MT/YR polysilicon plant when compared with a ‘Closed Loop TCS-Siemens Process’, which is equipped with only high-pressure, high-temperature operating hydro-chlorination FBRs.
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