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Low temperature plasma generator having an elongate discharge tube
Low temperature plasma generator having an elongate discharge tube
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机译:具有细长放电管的低温等离子体发生器
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摘要
A plasma generator for delivering a generated plasma to an area that is a distance from the area where the plasma is initially generated, including a dielectric tube portion extending from a gas inlet to a discharge aperture; an anode formed at least substantially around a portion of the discharge tube, wherein the anode is electrically coupled, via an electrical connection, to a power supply; a cathode formed at least substantially around a portion of the discharge tube, wherein the cathode is electrically coupled, via an electrical connection, to the power supply; and an elongate discharge tube attached or coupled to the discharge aperture such that when a generated plasma is produced, the generated plasma flows through the discharge tube.
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