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Oscillator Electrode Material Having Excellent Aging Characteristics, Piezoelectric Oscillator Using The Material And Sputtering Target Comprising The Material

机译：具有优良的时效特性的振子电极材料，使用该振子的压电振子和包含该振子的溅射靶

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摘要

An electrode material capable of making more satisfactory the dispersion at the time of production and the aging property of a resonator than Au and capable of reducing the price as compared to Au. An resonator electrode material including a ternary alloy composed of Au and two metals M1 and M2, and being used as an excitation electrode to excite oscillation in a piezoelectric element, wherein the two metals M1 and M2 are, respectively, (a) metal M1: a metal exhibiting a tendency to decrease the temporal frequency property (Δf1/f1) from the reference value f1, and (b) metal M2: a metal exhibiting a tendency to increase the temporal frequency property (Δf1/f1) from the reference value f1. The metal M1 is preferably at least any one of Ag, Al and Ni, and the metal M2 is preferably at least any one of Pd, Ru, Pt, Ir, Rh and Cu.

机译：与Au相比，能够使制造时的分散性和谐振器的老化特性更令人满意的电极材料，并且能够降低价格。一种谐振器电极材料，其包括由Au和两种金属M 1 和M 2 组成的三元合金，并用作激励电极以激发压电元件中的振荡，其中这两种金属M 1 和M 2 分别是（a）金属M 1：一种具有降低时间频率趋势的金属参考值f 1，和（b）金属M 2的特性（Δf 1 / f 1 ）：一种金属，具有从参考值f 1增大时频特性（Δf 1 / f 1 ）的趋势。金属M 1 优选为Ag，Al和Ni中的至少任意一种，金属M 2 优选为Pd，Ru，Pt，Ir，Rh和Pd中的至少任意一种。铜 展开▼

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公开/公告号US2012248943A1

专利类型

公开/公告日2012-10-04

原文格式PDF

申请/专利权人 TOSHINORI OGASHIWA;MASAAKI KURITA;TAKASHI TERUI;TAKAYUKI SAGAE;KATSUNORI AKANE;KENZO OKAMOTO;KENICHI UEKI;SHOHEI TAKEDA;
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申请/专利号US201013516365

发明设计人 TAKASHI TERUI;KATSUNORI AKANE;KENICHI UEKI;MASAAKI KURITA;KENZO OKAMOTO;TOSHINORI OGASHIWA;TAKAYUKI SAGAE;SHOHEI TAKEDA;
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申请日2010-04-28

分类号H01L41/16;C23C14/34;C22C30/00;C23C14/14;C22C5/02;C22C5/06;

国家 US

入库时间 2022-08-21 17:33:37

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