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Crystal oscillator and crystal unit and each method of manufacturing a crystal oscillator and crystal oscillator and crystal unit and quartz crystal oscillator
Crystal oscillator and crystal unit and each method of manufacturing a crystal oscillator and crystal oscillator and crystal unit and quartz crystal oscillator
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机译：晶体振荡器和晶体单元以及制造晶体振荡器和晶体振荡器的每种方法以及晶体单元和石英晶体振荡器
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摘要
PROBLEM TO BE SOLVED: To provide methods of manufacturing a microtuning fork-type bent crystal vibrators, crystal units and crystal oscillators having high-quality coefficient Q-factors and small capacitance ratios.;SOLUTION: The unit 170 vibrates in an inverse-phase bending mode and comprises a tuning fork type crystal vibrator 70 including a tuning fork base and first and second tuning fork arms connected to the tuning fork base, a case 71 and a cover 72. Metal films are formed, respectively, on the upper surface and the lower surface of a crystal wafer; a resist is applied thereon; the first and second tuning fork arms are formed; and grooves are formed on upper surfaces and lower surfaces of the first and second tuning fork arms. A first electrode formed thereon is connected to a second electrode formed on a side surface of the second tuning fork arm, and a third electrode similarly formed on the second tuning fork arm is connected to a fourth electrode formed on a side surface of the first tuning fork arm. The oscillation frequency of the tuning-fork type bent crystal vibrator is adjusted at least twice in different steps, the tuning-fork type bent crystal vibrator is fixed to a fixing part of the case, and the cover is connected to the case.;COPYRIGHT: (C)2010,JPO&INPIT
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