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Pattern the three-dimensional optical modulator which includes the mannered null multiple reflecting interfaces in order to form (1) in the three-dimensional
Pattern the three-dimensional optical modulator which includes the mannered null multiple reflecting interfaces in order to form (1) in the three-dimensional
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机译：图案化三维光学调制器，该三维光学调制器包括顺带零位多重反射界面，以便在三维中形成（1）
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摘要
PROBLEM TO BE SOLVED: To introduce a phase difference in the electromagnetic radiation from tilting micro-mirrors which may extend the addressable amplitude domain to encompass, for example, full, or substantially full, negative amplitude in addition to full, or substantially full, positive amplitude.;SOLUTION: The method is for patterning a workpiece by using a first part and a second part which generate radiation. The apparatus includes at least one reflection device adapted for forming a pattern on the work piece and inducing a phase difference in radiation. The apparatus for patterning the work piece includes a radiation source, and the phase difference is induced by at least one of a phase shifting plate and a difference in step height.;COPYRIGHT: (C)2010,JPO&INPIT
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