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In the SbTe basic alloy sintering body

机译:在SbTe碱性合金烧结体中

摘要

In the Sb Te basic alloy sintered body sputtering target, when has the organization which the minute carbon or the particle of boron encircles around the Sb Te basic alloy particle, average diameter of the Sb Te basic alloy particle X, designates the particle diameter of the carbon or boron as Y, the Sb Te basic alloy sintered body sputtering target which designates Sb and Te which feature that Y/X is a range 1/10 - 1/10000 as the main component. Improvement of Sb Te basic alloy sputtering target organization is assured, crack initiation of the sinterring target is controlled, occurrence of akingu is prevented at the time of sputtering.
机译:在Sb Te碱性合金烧结体溅射靶中,当具有微小的碳或硼粒子包围在Sb Te碱性合金粒子周围的组织时,Sb Te碱性合金粒子X的平均直径表示合金的粒径。以Y或X为1/10〜1/10000的主要成分为特征的Sb和Te作为Sb Te碱性合金烧结体溅射靶,以Y或X为中心。确保了Sb Te碱性合金溅射靶材组织的改善,控制了烧结靶材的裂纹萌生,并在溅射时防止了烧焦的发生。

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