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GaN-based LED element, the manufacturing method and the GaN-based LED element for manufacturing a template of a GaN-based LED element
GaN-based LED element, the manufacturing method and the GaN-based LED element for manufacturing a template of a GaN-based LED element
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机译:GaN基LED元件,制造方法以及用于制造GaN基LED元件的模板的GaN基LED元件
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摘要
PROBLEM TO BE SOLVED: To provide a GaN based LED element having a new structure with light extraction efficiency increased.;SOLUTION: The GaN based LED element 100 includes a laminate structure containing a substrate 10, a first layer 11 consisting of a GaN based semiconductor, and a second layer 12 consisting of the GaN based semiconductor and containing an emission member in this order. It includes a void S formed in the first layer 11, and an end surface 11a in the first layer 11 formed with wet-etching and slanted so as to direct to the substrate side is exposed inside the void S. In addition, the substrate 10 is exposed inside the void S.;COPYRIGHT: (C)2009,JPO&INPIT
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