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Being the high density MOS gate die device which possesses with the higher stratum of society where
Being the high density MOS gate die device which possesses with the higher stratum of society where
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机译：作为具有较高社会阶层的高密度MOS栅极器件
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摘要
A high density MOS-gated device comprises a semiconductor substrate and a doped upper layer of a first conduction type disposed on the substrate. The upper layer comprises a heavily doped source region of the first conduction type and a doped well region of a second and opposite conduction type at an upper surface. The upper surface, which comprises a contact area for the source region, further includes a recessed portion that comprises a contact area for a heavily doped deep body region of the second conduction type in the upper layer underlying the recessed portion. The device further includes a trench gate disposed in the upper layer and comprising a conductive material separated from the upper layer by an insulating layer. A process for forming a high density MOS-gated device comprises providing a semiconductor substrate comprising a doped upper layer of a first conduction type. A doped well region of a second and opposite conduction type is formed in an upper surface of the upper layer, and a dopant of the first conduction type is implanted in the well region to form a heavily doped source region. A layer of nitride is formed on the upper surface of the upper layer, and the nitride layer and upper layer are selectively etched, thereby forming a trench in the upper layer. The trench is lined with an insulating layer, then filled with a conductive material to form a trench gate. The nitride layer is removed, and a layer of interlevel dielectric material is formed on the trench gate and the upper surface of the upper layer. The interlevel dielectric layer is selectively etched, thereby forming a source region contact area. The source region is selectively etched to form a shallow recess that provides a body region contact area. A dopant of the second conduction type is implanted into the recess, thereby forming a deep body region underlying the recess.
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