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The PVD copper seed overhang re-spatter which accompanies the ionization of the copper which is strengthened

机译:PVD铜种子突出物会重新飞溅,伴随铜离子的离子化增强

摘要

Method and the device which make the metal accumulate on the baseplate where pattern was formed are offered. Metal layer, is formed with the physical evaporation process which possesses 1st energy. 2nd physical evaporation process is done with respect to metal layer making use of 2nd energy, here, sedimentary layer receives the interaction of brittleness and plastic surface correction process, isomorphic metal layer is almost formed on the baseplate.
机译:提供了使金属堆积在形成图案的基板上的方法和装置。金属层是通过具有第一能量的物理蒸发过程形成的。利用第二能量对金属层进行第二次物理蒸发处理,这里,沉积层接受脆性和塑性表面校正处理的相互作用,在基板上几乎形成同形金属层。

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