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PIEZOELECTRIC LAMINATE CERAMIC ACTUATOR AND MANUFACTURING METHOD THEREOF
PIEZOELECTRIC LAMINATE CERAMIC ACTUATOR AND MANUFACTURING METHOD THEREOF
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机译:压电叠层陶瓷作动器及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a piezoelectric laminate ceramic actuator having a structure which excels in both reliability and durability, and a method for manufacturing the same.;SOLUTION: Concerning a piezoelectric laminate ceramic actuator comprised of piezoelectric ceramic layers and internal electrode layers which are alternately laminated one on top of anther, a piezoelectric laminate ceramic actuator, in which effective active layers consisting of piezoelectric ceramic layers 1 and internal electrodes 2 are connected in a laminate by a terminal electrode 3, has a structure provided with cushioning layer parts 11 in length of 1% to 30%, both ends incl., of the length in a side surface direction of an effective active layer section 8, the structure being accomplished by, in a laminating process, dispersedly shifting the end parts of internal electrode layers 2 opposing each other in a length of 30% or less in a side surface direction of the effective active layer section 8 between the laminate-connected effective active layer section 8 and an inactive part 10 which is used for extracting the internal electrode layers 2 into the terminal electrodes 3.;COPYRIGHT: (C)2012,JPO&INPIT
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