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THERMOPHYSICAL PROPERTY ANALYSIS METHOD, THERMOPHYSICAL PROPERTY ANALYSIS DEVICE USING METHOD THEREOF, AND THERMOPHYSICAL PROPERTY ANALYSIS PROGRAM
THERMOPHYSICAL PROPERTY ANALYSIS METHOD, THERMOPHYSICAL PROPERTY ANALYSIS DEVICE USING METHOD THEREOF, AND THERMOPHYSICAL PROPERTY ANALYSIS PROGRAM
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机译：热物理性质分析方法，使用该方法的热物理性质分析装置以及热物理性质分析程序
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摘要
PROBLEM TO BE SOLVED: To provide a thermophysical property analysis method capable of analyzing and evaluating a thermophysical property of an object to be measured with high accuracy even though the light penetration depth of a metal film created on the object to be measured is unknown, a thermophysical property analysis device using the method, and a program used by the device.;SOLUTION: In the present invention, a first metal film 12a and a second metal film 12b each having different film thickness are created on an object 11 to be measured, the first and second metal films 12a and 12b are irradiated with heat light B1 and detection light B2, respectively, a first reflected light intensity change and a second reflected light intensity change of reflected detection light B2a are respectively detected, predetermined normalization is subjected to the first reflected light intensity change on the basis of a specific time t1 calculated by comparing the first and second reflected light intensity changes, such an analysis model in which an arithmetic result based on an analysis model coincides with the normalized first reflected light intensity change within a predetermined range is searched, and the thermophysical property value of the object 11 to be measured is determined on the basis of the analysis model.;COPYRIGHT: (C)2012,JPO&INPIT
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