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NON-DEFECTIVE PRODUCT CRITERION SETTING METHOD IN INSPECTION DEVICE AND NON-DEFECTIVE PRODUCT CRITERION SETTING DEVICE
NON-DEFECTIVE PRODUCT CRITERION SETTING METHOD IN INSPECTION DEVICE AND NON-DEFECTIVE PRODUCT CRITERION SETTING DEVICE
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机译：检验装置中的非缺陷产品判据设定方法及非缺陷产品判据设定装置
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摘要
PROBLEM TO BE SOLVED: To provide a non-defective product criterion setting method for setting a non-defective product criterion for determining whether an inspection object is a non-defective product or a defective product in an inspection device for determining the quality of the inspection object based on inspection measured values obtained by using the inspection device for the inspection object.SOLUTION: A non-defective product criterion setting method includes: acquiring a distribution of non-defective product measured values obtained by using an inspection device for a plurality of non-defective products and a distribution of defective product measured values obtained by using the inspection device for a plurality of defective products; displaying the distribution of non-defective product measured values and the distribution of defective product measured values on the same screen with an abscissa axis set as the number of detection pixels and with an ordinate axis set as the number of samples; comparing both of the distributions with each other on the same screen; and setting an upper limit non-defective product criterion to be smaller than the lower limit of the distribution of defective product measured values on the upper limit side in the distribution of non-defective product measured values, and setting a lower limit non-defective product criterion to be larger than the upper limit of the distribution of defective product measured values on the lower limit side.
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