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The pattern generator which uses method and its method of generating 2 level pattern for lithography graph manipulation
The pattern generator which uses method and its method of generating 2 level pattern for lithography graph manipulation
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机译:使用该方法的图案生成器及其生成用于光刻图形操作的2级图案的方法
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摘要
This invention regards the method of generating 2 level pattern for the lithography graph manipulation with multi bimuretsuto. With this method, it can give the 1st pattern of the vector format. Vector format pattern after that is converted to the pattern of the pixel map format. Finally, 2 level pattern is formed with pixel map format pattern by the application of error spread. Selective figure Figure 7
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