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PYROELECTRIC TYPE DETECTOR, PYROELECTRIC TYPE DETECTION DEVICE, AND ELECTRONIC APPARATUS

机译:热电式检测器,热电式检测装置和电子设备

摘要

PROBLEM TO BE SOLVED: To provide a pyroelectric type detector, a pyroelectric type detection device, and an electronic apparatus in which an area is not enlarged even though a wiring connected to a first electrode is formed in a support member, and which are therefore suitable for high integration.SOLUTION: A pyroelectric type detector includes a base substrate 100, a spacer member 104 projecting from the base substrate 100, a support member 210 supported by the spacer member 104, and a pyroelectric type detection element 220 supported by the support member 210. The pyroelectric type detection element has a first electrode 234, a second electrode 236, and a pyroelectric body 232 disposed between the first electrode and the second electrode. The support member includes an insulation layer 212, a first wiring layer 214 disposed on a side closer to a second face 211B with respect to the insulation layer, and a first plug 216 which is through the insulation layer at a location where the pyroelectric body and a first wiring layer overlap with each other in a plan view, and which connects the first wiring layer and the first electrode.
机译:解决的问题:提供一种热电型检测器,热电型检测装置以及电子设备,即使在支撑构件中形成有连接至第一电极的配线,该电子设备也不会扩大面积,因此是合适的。解决方案:热电型检测器包括:基底基板100;从基底基板100突出的间隔构件104;由间隔构件104支撑的支撑构件210;以及由支撑构件支撑的热电型检测元件220。 210.热电型检测元件具有第一电极234,第二电极236和设置在第一电极和第二电极之间的热电体232。支撑构件包括绝缘层212,布置在相对于绝缘层更靠近第二面211B的一侧上的第一布线层214,以及在热电体和热电体的位置穿过绝缘层的第一插塞216。第一布线层在平面图中彼此重叠,并且连接第一布线层和第一电极。

著录项

  • 公开/公告号JP2012173235A

    专利类型

  • 公开/公告日2012-09-10

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORP;

    申请/专利号JP20110037960

  • 发明设计人 NODA TAKASHI;

    申请日2011-02-24

  • 分类号G01J1/02;H01L37/02;

  • 国家 JP

  • 入库时间 2022-08-21 17:42:50

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