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ASSIST MECHANISM AND ASSIST METHOD FOR CONVEYING HEAVY LOAD, AND DEVICE AND METHOD FOR FILM DEPOSITION

机译:用于减轻重负荷的辅助机构和辅助方法,以及用于沉积膜的装置和方法

摘要

PROBLEM TO BE SOLVED: To provide an assist mechanism and assist method for conveying a heavy load, suitable for conveying a heavy load, in particular two-dimensionally, in vacuum, and to provide a device and method for film deposition applying the assist mechanism and assist method.;SOLUTION: A film deposition device has a main shaft for conveying a heavy load one-dimensionally or two-dimensionally. In performing heavy load conveying assistance to reduce the load of the main shaft, the conveyance is performed via a link unit including a link having one end rotatably fixed to a wall of a vacuum chamber and the other end having the heavy load rotatably provided, and torque is applied to the one end by an assistance shaft so that the load of the main shaft driving the heavy load is reduced.;COPYRIGHT: (C)2012,JPO&INPIT
机译:解决的问题:提供一种用于输送重物的辅助机构和辅助方法,该辅助机构和辅助方法适用于在真空中尤其是二维地输送重物,并且提供一种使用该辅助机构进行膜沉积的装置和方法,解决方案:一种成膜装置,其主轴用于一维或二维输送重物。在执行重载输送辅助以减小主轴的负载时,经由连杆单元进行输送,该连杆单元包括连杆,该连杆的一端可旋转地固定到真空室的壁上,而另一端具有可旋转地设置的重物。辅助轴将扭矩施加到一端,从而减轻了驱动重载的主轴负荷。;版权所有:(C)2012,JPO&INPIT

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