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on nanometrischem or mikrometrischem scale vibrating electromechanical component with improved detektionsniveau
on nanometrischem or mikrometrischem scale vibrating electromechanical component with improved detektionsniveau
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机译:改进的检测技术在纳米计量学或微计量学规模的振动机电组件上的应用
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摘要
It is an electromechanical component vibrating at the micrometric or nanometric scale comprising a vibrating mechanical element (1) which cooperates with at least one electrode, called of detection (2). The detection electrode (2) is flexible and is intended to vibrate in phase opposition with respect to the vibrating mechanical element (1) .application to the resonators or movement sensors.
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