首页>
外国专利>
TEST HEAD, ELECTRONIC COMPONENT TEST EQUIPMENT AND METHOD FOR LOADING PERFORMANCE BOARD ON THE ELECTRONIC COMPONENT TEST EQUIPMENT
TEST HEAD, ELECTRONIC COMPONENT TEST EQUIPMENT AND METHOD FOR LOADING PERFORMANCE BOARD ON THE ELECTRONIC COMPONENT TEST EQUIPMENT
展开▼
机译:测试头,电子组件测试设备以及在电子组件测试设备上加载性能板的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
An electronic device test apparatus comprising: a test apparatus body for testing IC devices formed on a wafer for electrical characteristics; a probe card for electrically connecting the IC devices and the test apparatus body; a prober for pushing the wafer against the probe card so as to electrically connect the IC devices and the probe card; an abutting mechanism extending toward the back surface of the probe card and abutting against the back surface of the probe card; and a lock mechanism fixing the extension of the abutting mechanism in the state with the abutting mechanism abutting against the back surface of the probe card.
展开▼