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BIREFRINGENCE MEASURING METHOD AND APPARATUS USING OFF-AXIS DIGITAL HOLOGRAPHY
BIREFRINGENCE MEASURING METHOD AND APPARATUS USING OFF-AXIS DIGITAL HOLOGRAPHY
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机译：偏轴数字全息双折射测量方法及装置
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摘要
The present invention relates to a birefringence measurement apparatus and method using a digital holography for Off-axis method. And a light source for generating a linearly polarized beam having a polarization direction tilted 45 birefringence measurement apparatus, for each vertical polarization and horizontal polarization direction in accordance with the present invention; And the first beam splitter to divide the output of the linear polarized beam to the measurement beam path and the reference beam path from the light source; Off-axis method is inclined with respect to the reference beam path and a reference mirror disposed so as to be applicable; And a second beam splitter for the linearly polarized beam is emitted from the first light divider directing the linearly polarized beam that is emitted from the first light dividing mirror so that the reflection by the reference mirror to the reference direction; And a reflecting mirror for reflecting the linearly polarized light beam emitted from the first beam splitter, the linearly polarized light beam is emitted from the first beam splitter to transmit the measurement object with the measurement object orientation; 3 for the linear polarization beam is output is formed by dividing a measurement beam reflected from the reference mirror for the reference beam is transmitted through the linearly polarized beam and the measurement object is formed by the first imaging unit and the second imaging section direction and a beam splitter; And a vertical polarizer for outputting the first image pickup portion is disposed between the first imaging unit and the third beam splitter to pass through the vertical polarization component of the interference light formed by the interference between the measuring beam and the reference beam; The first imaging unit and is disposed between the third beam splitter for outputting the horizontal line polarizing plate and the second image pickup portion is passed through the horizontal polarization component of the interference light; The digital holographic analysis method of the Off-axis method for each of the horizontal polarization component taken by the second imaging section and the vertical polarization component which is picked up by the first image pickup unit is applied to the vertical polarization for the polarization component perpendicular phase information and phase information of the horizontal polarization and the horizontal polarization component is extracted, and the vertical polarization and phase information; and a control unit for calculating the magnitude of the double refraction of the measurement object on the basis of the horizontal polarization phase information .
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