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METHOD FOR FORMING A FERROELECTRIC THIN FILM INCLUDING ACID TREATMENT CAPABLE OF UNIFORMLY FORMING A THIN FILM BY TREATING A SUBSTRATE WITH ACIDS AND ETCHING A BASIC SURFACE BEFORE THE FORMATION OF A PEROVSKITE TYPE FERROELECTRIC THIN FILM BY A HYDROTHERMAL METHOD
METHOD FOR FORMING A FERROELECTRIC THIN FILM INCLUDING ACID TREATMENT CAPABLE OF UNIFORMLY FORMING A THIN FILM BY TREATING A SUBSTRATE WITH ACIDS AND ETCHING A BASIC SURFACE BEFORE THE FORMATION OF A PEROVSKITE TYPE FERROELECTRIC THIN FILM BY A HYDROTHERMAL METHOD
PURPOSE: A method for preparing a ferroelectric thin film is provided to form a uniform thin film and to obtain a piezoelectric thin film of high quality since a thermal stress and a thermal diffusion between a substrate and a thin film is minimized and the formation of oxygen vacancy is also minimized.;CONSTITUTION: A method for preparing a ferroelectric thin film comprises the steps of: etching a basic surface performing acid treatment of the surface of a substrate in order to expose an acidic surface; forming a Perovskite-type ferroelectric thin film on the substrate passing through acid treatment by a hydrothermal synthesis method. The hydrothermal synthesis method comprises the steps of: injecting a substrate into a strong base reactive solution including a precursor compound for producing a Perovskite-type ferroelectric and water into a substrate; and performing the reaction at the temperature lower than the phase transfer temperature of the Perovskite-type ferroelectric.;COPYRIGHT KIPO 2012
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