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THREE-AXIAL ACCELERATION SENSOR AND A METHOD FOR MANUFACTURING THE SAME CAPABLE OF ATTACHING THE Z-AXIAL ACCELERATION SENSOR ON THE XY-AXIAL ACCELERATION SENSOR
THREE-AXIAL ACCELERATION SENSOR AND A METHOD FOR MANUFACTURING THE SAME CAPABLE OF ATTACHING THE Z-AXIAL ACCELERATION SENSOR ON THE XY-AXIAL ACCELERATION SENSOR
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机译:三轴加速度传感器和制造能够在Z轴加速度传感器上安装Z轴加速度传感器的能力的方法
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摘要
PURPOSE: A three-axial acceleration sensor and a method for manufacturing the same are provided to reduce area for the three-axial acceleration sensor by bonding the Z-axial acceleration sensor on the XY-axial acceleration sensor. ;CONSTITUTION: The XY-axial acceleration sensor(400) detects the acceleration of a substrate on the XY-axial direction of a horizontal plane. The Z-axial acceleration sensor(300) is bonded on the upper side of the XY-axial acceleration sensor to be formed on the vertical line of the plane of the XY-axial acceleration sensor. The XY-axial acceleration sensor and the Z-axial acceleration sensor are composed of fixed fingers and moving fingers.;COPYRIGHT KIPO 2011
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