首页> 外国专利> SUBSTRATE ALIGNING DEVICE, PARTICULARLY FOR REDUCING THE OCCURRENCE OF DUSTS CAUSED BY THE ABRASION OF ELEMENTS WHEN ALIGNING A SUBSTRATE

SUBSTRATE ALIGNING DEVICE, PARTICULARLY FOR REDUCING THE OCCURRENCE OF DUSTS CAUSED BY THE ABRASION OF ELEMENTS WHEN ALIGNING A SUBSTRATE

机译:基材沉降装置,特别是用于降低基材沉降时因磨蚀元素而引起的粉尘发生率

摘要

PURPOSE: A substrate aligning device is provided to reduce the defective proportion of a substrate caused by dusts by decreasing the occurrence of the dusts resulting from the abrasion of elements through the application a nut unit and a ball screw to the substrate aligning device.;CONSTITUTION: First outer grooves are prepared at one side of a screw, and the second external grooves which are opposite to the first external grooves are prepared in the other side of the screw. First and second nut units(120,130) are respectively coupled to the first and second external grooves. The first and/or second nuts are supported by a body not to rotate. The substrate is aligned at a certain position, and the first and second nuts are moved toward the substrate.;COPYRIGHT KIPO 2011
机译:目的:提供一种基板对准装置,通过在基板对准装置上安装螺母单元和滚珠丝杠,减少因元件磨损而产生的粉尘,从而减少由灰尘引起的基板不良率。 :在螺钉的一侧准备第一外槽,在螺钉的另一侧准备与第一外槽相对的第二外部槽。第一和第二螺母单元(120,130)分别联接到第一和第二外部凹槽。第一和/或第二螺母由不旋转的主体支撑。将基板对准某个位置,然后将第一螺母和第二螺母移向基板。; COPYRIGHT KIPO 2011

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