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SUBSTRATE ALIGNING DEVICE, PARTICULARLY FOR REDUCING THE OCCURRENCE OF DUSTS CAUSED BY THE ABRASION OF ELEMENTS WHEN ALIGNING A SUBSTRATE
SUBSTRATE ALIGNING DEVICE, PARTICULARLY FOR REDUCING THE OCCURRENCE OF DUSTS CAUSED BY THE ABRASION OF ELEMENTS WHEN ALIGNING A SUBSTRATE
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机译:基材沉降装置,特别是用于降低基材沉降时因磨蚀元素而引起的粉尘发生率
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摘要
PURPOSE: A substrate aligning device is provided to reduce the defective proportion of a substrate caused by dusts by decreasing the occurrence of the dusts resulting from the abrasion of elements through the application a nut unit and a ball screw to the substrate aligning device.;CONSTITUTION: First outer grooves are prepared at one side of a screw, and the second external grooves which are opposite to the first external grooves are prepared in the other side of the screw. First and second nut units(120,130) are respectively coupled to the first and second external grooves. The first and/or second nuts are supported by a body not to rotate. The substrate is aligned at a certain position, and the first and second nuts are moved toward the substrate.;COPYRIGHT KIPO 2011
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