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STRAINED SI BASED LAYER MADE BY UHV-CVD, AND DEVICES THEREIN

机译:用特高压化学气相沉积法制得的应变SI基层及其装置

摘要

A method for fabricating a strained Si based layer comprising the steps of: growing epitaxially a SiGe layer on a substrate, wherein creating a varying Ge concentration in the thickness direction of said SiGe layer, said Ge concentration having a first value at the interface with said substrate and having a second value at full thickness of said SiGe layer, said second value of Ge concentration being larger than said first value of Ge concentration, furthermore said SiGe layer imbedding a Ge overshoot zone, wherein larger than said second value; depositing epitaxially said Si baSed layer onto said SiGe layer; and transferring said strained Si based layer onto a second substrate.
机译:一种制造应变硅基层的方法,包括以下步骤:在衬底上外延生长SiGe层,其中在所述SiGe层的厚度方向上产生变化的Ge浓度,所述Ge浓度在与所述SiGe的界面处具有第一值衬底并且在所述SiGe层的整个厚度处具有第二值,所述Ge浓度的第二值大于所述Ge浓度的第一值,并且所述SiGe层嵌入Ge过冲区,其中,所述Ge过冲区大于所述第二值;将所述硅基外延层外延沉积在所述硅锗层上;并将所述应变硅基层转移到第二衬底上。

著录项

  • 公开/公告号IN244686B

    专利类型

  • 公开/公告日2010-12-17

    原文格式PDF

  • 申请/专利权人

    申请/专利号IN1970/CHENP/2004

  • 发明设计人 CHU JACK O;ISMAIL KHALED;

    申请日2004-09-03

  • 分类号H01L21/20;

  • 国家 IN

  • 入库时间 2022-08-21 18:05:37

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