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METHOD OF WAVEFRONT ANALYSIS, METHOD OF PHASE CHANGE ANALYSIS, METHOD OF PROVIDING SIMULTANEOUS SURFACE AND LAYER THICKNESS MEASUREMENTS, APPARATUS FOR WAVEFRONT ANALYSIS, METHOD OF PROPERTY ANALYSIS AND A WAVEFRONT ANALYSIS SYSTEM
METHOD OF WAVEFRONT ANALYSIS, METHOD OF PHASE CHANGE ANALYSIS, METHOD OF PROVIDING SIMULTANEOUS SURFACE AND LAYER THICKNESS MEASUREMENTS, APPARATUS FOR WAVEFRONT ANALYSIS, METHOD OF PROPERTY ANALYSIS AND A WAVEFRONT ANALYSIS SYSTEM
A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134) wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.
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