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High-sensitivity method for detecting differences between the physically measurable properties of a sample and a reference

机译:高灵敏度方法,用于检测样品和参比样品的物理可测量特性之间的差异

摘要

A method for detecting differences between physically measurable properties of a sample and a reference sample. A two-dimensional reference field is generated and first and second two-dimensional patterns are produced respectively from the reference sample and the sample. A correction is made to sample response functions to eliminate time-dependent and location-dependent fluctuations of the detector.
机译:一种用于检测样品和参考样品的物理可测量特性之间差异的方法。产生二维参考场并且分别从参考样本和样本产生第一和第二二维图案。对样本响应函数进行了校正,以消除检测器的时间相关和位置相关的波动。

著录项

  • 公开/公告号US7847930B2

    专利类型

  • 公开/公告日2010-12-07

    原文格式PDF

  • 申请/专利权人 RUEDIGER SENS;ERWIN THIEL;

    申请/专利号US20050722757

  • 发明设计人 RUEDIGER SENS;ERWIN THIEL;

    申请日2005-12-21

  • 分类号G01J1/10;

  • 国家 US

  • 入库时间 2022-08-21 18:07:35

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