首页> 外国专利> Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

机译:通过能量刺激的局部去除固体冷凝气体层以及通过这种层产生的固态化学反应进行图案化

摘要

The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.
机译:本发明提供了一种用于在结构上形成图案化材料层的方法,该方法是通过将蒸气冷凝至结构表面上的固体冷凝物层,然后通过将能量束导向所选位置来局部去除冷凝物层的所选区域。地区。然后可以对结构进行处理,在结构表面上至少有一部分图案化的固体冷凝物层,然后除去固体冷凝物层。此外,通过将能量束引导到冷凝物层的至少一个选定区域,可以在固体冷凝物层与结构之间刺激局部反应。

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