首页> 外国专利> SHAPE CHARACTERIZATION WITH ELLIPTIC FOURIER DESCRIPTOR FOR CONTACT OR ANY CLOSED STRUCTURES ON THE CHIP

SHAPE CHARACTERIZATION WITH ELLIPTIC FOURIER DESCRIPTOR FOR CONTACT OR ANY CLOSED STRUCTURES ON THE CHIP

机译:椭圆形傅里叶描述器的形状特征,可用于芯片上的接触或任何封闭结构

摘要

Shapes and orientations of contacts or other closed contours on an integrated circuit are characterized by calculating Elliptic Fourier descriptors. The descriptors are then used for generating design rules for the integrated circuit and for assessing process capability for the manufacturing of the integrated circuit. Monte Carlo simulation can be performed in conjunction with the elliptic Fourier descriptors.
机译:通过计算椭圆傅立叶描述符来表征集成电路上触点或其他闭合轮廓的形状和方向。然后,将描述符用于生成集成电路的设计规则,以及评估集成电路制造的处理能力。可以与椭圆傅立叶描述符一起执行蒙特卡罗模拟。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号