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首页> 外国专利> Ultrahard multilayer coating comprising nanocrystalline diamond and nanocrystalline cubic boron nitride

Ultrahard multilayer coating comprising nanocrystalline diamond and nanocrystalline cubic boron nitride

机译：包含纳米晶金刚石和纳米晶立方氮化硼的超硬多层涂层

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摘要

A multilayer coating (MLC) is composed of two chemically different layered nanocrystalline materials, nanodiamond (nanoD) and nano-cubic boron nitride (nono-cBN). The structure of the MLC and fabrication sequence of layered structure are disclosed. The base layer is preferably nanoD and is the first deposited layer serving as an accommodation layer on a pretreated substrate. It can be designed with a larger thickness whereas subsequent alternate nano-cBN and nanoD layers are typically prepared with a thickness of 2 to 100 nm. The thickness of these layers can be engineered for a specific use. The deposition of the nanoD layer, by either cold or thermal plasma CVD, is preceded by diamond nucleation on a pretreated and/or precoated substrate, which has the capacity to accommodate the MLC and provides excellent adhesion. Nano-cBN layers are directly grown on nanodiamond crystallites using ion-assisted physical vapor deposition (PVD) and ion-assisted plasma enhanced chemical vapor deposition (PECVD), again followed by nanodiamond deposition using CVD methods in cycles until the intended number of layers of the MLC is obtained.
机译：多层涂层（MLC）由两种化学上不同的层状纳米晶体材料组成：纳米金刚石（nanoD）和纳米立方氮化硼（nono-cBN）。公开了MLC的结构和分层结构的制造顺序。基础层优选是nanoD，并且是在预处理的基板上用作容纳层的第一沉积层。可以将其设计为具有更大的厚度，而随后的交替纳米cBN和nanoD层通常准备为2至100 nm的厚度。这些层的厚度可以设计用于特定用途。通过冷等离子体CVD或热等离子体CVD沉积nanoD层之前，在经过预处理和/或预涂覆的基​​板上进行金刚石成核之前，其具有容纳MLC的能力并提供出色的附着力。使用离子辅助物理气相沉积（PVD）和离子辅助等离子体增强化学气相沉积（PECVD）将纳米cBN层直接在纳米金刚石微晶上生长，然后再次循环使用CVD方法进行纳米金刚石沉积，直到达到所需的层数获得MLC。

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