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Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite
Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite
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机译：多孔微针阵列的制造方法以及相应的多孔微针阵列和相应的基板复合材料
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摘要
A manufacturing method for a porous microneedle array includes: forming a plurality of porous microneedle arrays, each having at least one microneedle and a porous carrier zone lying beneath it on the face of a semiconductor substrate; forming an interlayer between a non-porous residual layer of the semiconductor substrate located on the back side of the semiconductor substrate and the carrier zone, which has greater porosity than the carrier zone; detaching the residual layer from the carrier zone by breaking up the interlayer; and separating the microneedle arrays into corresponding chips.
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