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AlxGa(1-x)N SINGLE CRYSTAL, METHOD OF PRODUCING AlxGa(1-x)N SINGLE CRYSTAL, AND OPTICAL COMPONENT

机译:AlxGa(1-x)N单晶,AlxGa(1-x)N单晶的制备方法和光学元件

摘要

A method of producing an AlxGa(1-x)N (0x≦1) single crystal is directed to growing an AlxGa(1-x)N single crystal by sublimation. The method includes the steps of preparing an underlying substrate having a composition ratio x identical to the composition ratio of the AlxGa(1-x)N single crystal, preparing a raw material of high purity, and growing an AlxGa(1-x)N single crystal on the underlying substrate by sublimating the raw material. The AlxGa(1-x)N single crystal has an absorption coefficient less than or equal to 100 cm−1 with respect to light at a wavelength greater than or equal to 250 nm and less than 300 nm, and an absorption coefficient less than or equal to 21 cm−1 with respect to light at a wavelength greater than or equal to 300 nm and less than 350 nm.
机译:一种生产Al x Ga (1-x) N(0 x Ga (1-x) N单晶。该方法包括以下步骤:制备具有与Al x Ga (1-x) N单晶的组成比相同的组成比x的下层基板。高纯度的原材料,并通过升华该原材料在下面的衬底上生长Al x Ga (1-x) N单晶。 Al x Ga (1-x) N单晶对光的吸收系数小于或等于100 cm -1 波长大于或等于250 nm且小于300 nm,并且对于波长大于或等于300 nm的光的吸收系数小于或等于21 cm -1 并且小于350 nm。

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