[Challenge] Systems and methods for cleaning the (202) [SOLUTION] substrate comprises a (206) megasonic chamber and a (202) substrate (210) transducer. Transducer (210), facing towards the substrate (202). Substrate (210) and transducer (202), and are separated by a variable distance d. The system (200), and an RF generator dynamically adjustable having an output coupled to the transducer (212). RF generator dynamically adjustable (212) can be controlled by comparing the phase of the output voltage of the RF generator and the phase of the output voltage of the oscillator (306). Be controlled by controlling the RF generator RF generator dynamically adjustable Moreover, (212) monitors the peak voltage of the output signal, so as to maintain the voltage within a predetermined range and the peak voltage I can also. RF generator dynamically adjustable (212) can also be controlled by dynamically controlling the DC voltage source variable.
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