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Connotation hurrah in the production manner of run and

机译：运行和生产方式的内涵欢呼

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摘要

PPROBLEM TO BE SOLVED: To provide a method and an apparatus for producing an inclusion fullerene, wherein the yields of the inclusion fullerene can be markedly improved not only because the inclusion fullerene can be obtained also in the central part of a hot plate, but also because fullerene is fed along the plasma stream effluence direction, and wherein the entire apparatus size can be reduced because the distance between the fullerene feed position and the hot plate can be reduced. PSOLUTION: A plasma stream 2 of atoms to be included is formed in a vacuum chamber 1 by feeding the atoms toward a hot plate 3. Fullerene is fed into the vacuum chamber 1 along the direction of effluence of the plasma stream 2. Inclusion fullerene is deposited on a deposition plate 5 placed downstream of the plasma stream 2 by applying a biased voltage to the plate 5. PCOPYRIGHT: (C)2005,JPO&NCIPI

机译：

要解决的问题：提供一种制备夹杂物富勒烯的方法和装置，其中不仅可以在加热板的中央部分获得夹杂物富勒烯，而且可以显着提高夹杂物富勒烯的产率。这是因为沿等离子体流流出方向进料了富勒烯，并且由于可以减小富勒烯进料位置与加热板之间的距离，因此可以减小整个装置的尺寸。解决方案：通过将原子向热板3进料，在真空室1中形成要包含的原子的等离子体流2。沿着等离子体流2的流出方向将富勒烯进料到真空室1中。通过向板5施加偏置电压，将夹杂物富勒烯沉积在位于等离子体流2下游的沉积板5上。

版权：（C）2005，JPO＆NCIPI 展开▼

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公开/公告号JP4711614B2

专利类型
公开/公告日2011-06-29

原文格式PDF
申请/专利权人株式会社イデアルスター;
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申请/专利号JP20030376326
发明设计人表研次;笠間泰彦;横尾邦義;
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申请日2003-11-05
分类号C01B31/02;B82B3/00;
国家 JP
入库时间 2022-08-21 18:18:19

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