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Being the disclosure device for exposure test of the exposure or exposure test device null test piece which
Being the disclosure device for exposure test of the exposure or exposure test device null test piece which
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机译：作为用于曝光测试的公开装置的曝光或曝光测试装置无效的测试片，
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摘要
PROBLEM TO BE SOLVED: To overcome the problem that an assembled product is totally unstable since a plurality of band-like ultraviolet filters need to be disposed near a xenon reflector in a conventional exposure apparatus.;SOLUTION: The apparatus is provided with a chamber in which an ultraviolet source and a vessel 10 are disposed. The vessel is provided with a bottom wall 1 for attaching a specimen, the ultraviolet filter 2 opposite to the bottom wall 1, and a plurality of side walls 3 for mutually coupling the bottom wall 1 and the ultraviolet filter 2.;COPYRIGHT: (C)2008,JPO&INPIT
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