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From the metal content mixed acid aqueous solution which features that it distills the Acid and the water other than phosphoric acid by distilling the aforementioned mixed acid aqueous solution
From the metal content mixed acid aqueous solution which features that it distills the Acid and the water other than phosphoric acid by distilling the aforementioned mixed acid aqueous solution
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机译：从特征在于通过蒸馏上述混合酸水溶液来蒸馏酸和除磷酸以外的水的金属含量混合酸水溶液
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摘要
PROBLEM TO BE SOLVED: To provide a method and a device where, from a metal-containing mixed acid aqueous solution such as a metal-containing acid waste solution generated, e.g. from an etching stage for metal such as aluminum in a semiconductor production workshop or the like, the metal is separated, and further, the phosphoric acid is recovered at a high yield.;SOLUTION: In the method where, from a metal-containing mixed acid aqueous solution comprising metal, phosphoric acid and at least one kind of acid other than the phosphoric acid, the phosphoric acid is recovered, (1) the mixed acid aqueous solution is distilled, thus the acid other than the phosphoric acid and water are distilled, (2) the remaining liquid comprising the phosphoric acid and water is melted and crystallized under the conditions where the phosphoric acid is crystallized, and separation is caused with the phosphoric acid as a solid and the metal as an aqueous solution, respectively.;COPYRIGHT: (C)2006,JPO&NCIPI
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