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Classification device clas and - a method for the classification of surface defects, in particular of wafer surfaces

机译：分类装置的分类和-用于对表面缺陷，特别是晶片表面进行分类的方法

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摘要

Classification means for the classification of surface defects on object surfaces, in particular on surfaces, with– an analyzer (103) and is equipped for determining values of certain flaw characteristics of the upper surfaces defect,– a memory device (107), on the at least one property information from the group consisting of essential conditions and property value distributions for each predefined defect class is stored,– a first comparison means (105), connected with the analysis device (103) and the storage device (107) and adapted for testing of the detected defective strength shaft values fulfilling of the compulsory conditions and for outputting a classification ifi cation - flag, if the compulsory conditions are fulfilled and no characteristic value distribution for the defect class is stored, and– a second comparison means (105), connected with the analysis device (103) and the storage device (107) and adapted for comparing the characteristic value distributions with the detected defective strength shaft values and for outputting a probability value for the association of the upper surfaces defect to the defect class on the basis of the comparison of.

机译：分类装置用于对物体表面（特别是表面）上的表面缺陷进行分类，包括：-分析仪（103），并配备用于确定上表面缺陷的某些缺陷特征值的仪器;-存储装置（107），用于分析物体表面的缺陷。存储了由每个预定义缺陷类别的基本条件和属性值分布组成的组中的至少一个属性信息; –第一比较装置（105），与分析设备（103）和存储设备（107）连接并进行了适配用于测试检测到的满足要求的缺陷强度轴的条件是否满足强制条件，以及用于输出分类标志-如果满足强制条件且未存储缺陷类别的特征值分布，则-第二比较装置（105 ），与分析装置（103）和存储装置（107）连接，并且适于将特征值分布与检测器进行比较。缺陷强度轴值，并在比较的基础上输出将上表面缺陷与缺陷类别关联的概率值。

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公开/公告号DE102008001173B9

专利类型
公开/公告日2010-06-02

原文格式PDF
申请/专利权人
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申请/专利号DE20081001173
发明设计人
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申请日2008-04-14
分类号G01N21/95;H01L21/66;
国家 DE
入库时间 2022-08-21 18:29:01

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