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Apparatus for surface treatment with plasma in atmospheric pressure having parallel plates type electrode structure
Apparatus for surface treatment with plasma in atmospheric pressure having parallel plates type electrode structure
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机译：具有平行板型电极结构的常压等离子体表面处理装置
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摘要
An atmospheric pressure plasma surface processing apparatus having a parallel flat type electrode structure and a surface processing method thereof are provided to process efficiently surfaces of chemical active species by preventing damage due to charged particles. An atmospheric pressure plasma surface processing apparatus(100) having a parallel flat type electrode structure includes a power electrode and lower grounding electrodes(31,32). The power electrode receives a voltage. The lower grounding electrodes are installed under the power electrode. The lower grounding electrodes are opposite to the power electrode in order to form lower plasma generation spaces(41,42). A plurality of outlets(53) are formed at the lower grounding electrodes in order to discharge the plasma and the processing gas. The thickness of the lower grounding electrode is 3-50mm.
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