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SUBSTRATE EXCHANGE APPARATUS AND A SUBSTRATE EXCHANGING METHOD THEREOF, CAPABLE OF INCREASING THE NUMBER OF SUBSTRATES PROCESSED PER UNIT HOUR
SUBSTRATE EXCHANGE APPARATUS AND A SUBSTRATE EXCHANGING METHOD THEREOF, CAPABLE OF INCREASING THE NUMBER OF SUBSTRATES PROCESSED PER UNIT HOUR
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机译：基质交换装置及其基质交换方法，能够增加每单位小时处理的母版数量
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摘要
PURPOSE: A substrate exchange apparatus and a substrate exchanging method thereof are provided to improve the manufacturing process speed by minimizing the time required for transferring the substrate.;CONSTITUTION: A first supporting member(31) for supporting a first substrate(W1) is installed on the periphery of load lock chamber. A second supporting member(32) for supporting a second substrate(W2) is installed within the load lock chamber. A first conveying member(41) and a second conveying member(42) are installed on a transferring apparatus.;COPYRIGHT KIPO 2011
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