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METHOD FOR MANUFACTURING A VERTICAL COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR IMAGE SENSOR, CAPABLE OF IMPROVING THE ELECTRICAL CHARACTERISTIC OF A PHOTO DIODE
METHOD FOR MANUFACTURING A VERTICAL COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR IMAGE SENSOR, CAPABLE OF IMPROVING THE ELECTRICAL CHARACTERISTIC OF A PHOTO DIODE
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机译:垂直互补金属氧化物-半电子图像传感器的制造方法,该传感器能够改善光电二极管的电特性
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摘要
PURPOSE: A method for manufacturing a vertical complementary metal-oxide-semiconductor image sensor is provided to reduce the extinction of electrons, which are generated by the light, by implanting deuterium ions which is optimized to the defect region in an epi layer.;CONSTITUTION: A first deuterium ion region(14) is formed on a semiconductor substrate including a first photo diode. A first epi layer is formed on the entire surface of a semiconductor substrate including the first photo diode. A second deuterium ion region is formed on the first epi layer including a second photo diode. A second epi layer(16) is formed on the entire surface of the first epi layer including the second photo diode. A third deuterium ion region(30) is formed on the second epi layer including a third photo diode.;COPYRIGHT KIPO 2010
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