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SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME, CAPABLE OF PREVENTING NOT ONLY A VOID DUE TO A NECK BUT ALSO FALLING OF A PILLAR TYPE ACTIVE DUE TO THE NECK
SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME, CAPABLE OF PREVENTING NOT ONLY A VOID DUE TO A NECK BUT ALSO FALLING OF A PILLAR TYPE ACTIVE DUE TO THE NECK
PURPOSE: A semiconductor device and a method of manufacturing the same are provided to improve the characteristics and reliability of the semiconductor device by stabilizing a vertical transistor manufacturing process.;CONSTITUTION: In a semiconductor device and a method of manufacturing the same, a semiconductor substrate(100) comprises a pillar type active(100a). The pillar type active has a flat side. A spacer(112), having a thickness of 50-250 angstrom, is formed on the both sides of the upper part of the pillar type active. A gate including a metal film protects the bottom of the pillar type active. The gate comprises a metal layer.;COPYRIGHT KIPO 2010
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