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AN INTEGRATED MARK ALIGNMENT APPARATUS, AN INTEGRATED MARK ALIGNMENT SYSTEM AND A MARK ALIGNMENT METHOD USING A WIDE ANGLE MARK AND A NARROW ANGLE MARK
AN INTEGRATED MARK ALIGNMENT APPARATUS, AN INTEGRATED MARK ALIGNMENT SYSTEM AND A MARK ALIGNMENT METHOD USING A WIDE ANGLE MARK AND A NARROW ANGLE MARK
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机译：集成标记对准装置，集成标记对准系统和使用宽角度标记和窄角度标记的标记对准方法
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摘要
PURPOSE: An integrated mark align device using a wide angle mark and a narrow angle mark, an integrated mark align system thereof, and an integrated mark align method thereof are provided to simplifying the manipulation of the integrated mark align device and to reduce manipulating time by operating a wide angle align camera and a narrow angle align camera with the rotation of a first reflective mirror used with the wide angle align camera. CONSTITUTION: An integrated mark align device using a wide angle mark and a narrow angle mark includes a wide angle align camera(230a), a first optical system(232a), a first reflective mirror(234a), a narrow angle align camera(230b), a second reflective mirror(234b), a second optical system, and a controller. The wide angle align camera measures the image of a wide angle mark. The first optical system is offered to the front part of the wide angle align camera and magnifies the image of the wide angle image. The first reflective mirror is offered between the wide angle align camera and the first optical system. The narrow angle align camera measures the image of a narrow angle mark. The second reflective mirror is offered in order to reflect the image of the narrow angle mark reflected from the first reflective mirror to the narrow angle align camera. The second optical system is offered between the second reflective mirror and the wide angle align camera and magnifies the image of the narrow angle image. The controller controls the operation of the wide angle align camera, the first reflective mirror, the narrow angle align camera, and a stage(212).
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