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Advanced process control method and advanced process control system for acquiring production data in a chip production installation
Advanced process control method and advanced process control system for acquiring production data in a chip production installation
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机译:用于在芯片生产设备中获取生产数据的高级过程控制方法和高级过程控制系统
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摘要
For monitoring production data, a grouping table in which machines are grouped into machine groups, machine components are grouped into machine component groups, chip manufacturing recipes are grouped into recipe groups or chip manufacturing parameters are grouped into parameter groups is used, whereby a considerable improvement in the comparability of the production data to be monitored is achieved.
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