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ATOMIC FORCE MICROSCOPE AND INTERACTION FORCE MEASUREMENT METHOD USING ATOMIC FORCE MICROSCOPE
ATOMIC FORCE MICROSCOPE AND INTERACTION FORCE MEASUREMENT METHOD USING ATOMIC FORCE MICROSCOPE
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机译：原子力显微镜和使用原子力显微镜的相互作用力测量方法
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摘要
A frequency shift Δf obtained by an FM-AFM can be expressed by a simple linear coupling of a ΔfLR derived from a long-range interaction force and a ΔfSR derived from a short-range interaction force. Given this factor, a Δf curve on an atomic defect and a Δf curve on a target atom on the sample surface are each measured for only a relatively short range scale (S1 and S2), and a difference Δf curve of those two curves is obtained (S3). Since the difference Δf curve is derived only from a short-range interaction force, a known conversion operation is applied to this curve obtain an F curve which illustrates the relationship between the force and the distance Z, and then the short-range interaction force on the target atom is obtained from the F curve (S4). Since the range scale in measuring the Δf curve can be narrowed, the measurement time can be shortened, and since the conversion from the Δf curve into F curve is required only once, the computational time can also be shortened. Consequently, in obtaining the short-range interaction force which acts between the atom on the sample surface and the probe, the time required for the Δf curve's measurement and the computational time are shortened, which leads to accuracy improvement and throughput enhancement.
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机译：FM-AFM所获得的频移Δf可以通过简单的线性耦合表示，该线性耦合是从长程相互作用力得出的Δf LR 和从得出的Δf SR 短距离的相互作用力。在此因素的作用下，仅针对相对较短的范围尺度（S 1 和S 2 <）分别测量样品表面原子缺陷上的Δf曲线和目标原子上的Δf曲线。 / B>），然后获得这两条曲线的差Δf曲线（S 3 ）。由于差值Δf曲线仅从短程相互作用力得出，因此对该曲线应用已知的转换操作可获得一条F曲线，该曲线说明了力与距离Z之间的关系，然后对从F曲线（S 4 ）获得目标原子。由于可以缩小测量Δf曲线的范围尺度，因此可以缩短测量时间，并且由于仅需要一次从Δf曲线到F曲线的转换，所以也可以缩短计算时间。因此，在获得作用在样品表面上的原子和探针之间的短程相互作用力时，缩短了Δf曲线的测量所需的时间和计算时间，这导致精度提高和通量提高。
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