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Acquisition method and apparatus of the inverse matrix of the transmission gain matrix

机译:传输增益矩阵的逆矩阵的获取方法和装置

摘要

PROBLEM TO BE SOLVED: To obtain a method for obtaining the inverse matrix of a transmission gain matrix in a heat treating device in a short time. ;SOLUTION: When plural first temperature sensors 4 arranged in the periphery of a heating source 3 and plural second temperature sensors 5 arranged in a furnace are put in temperature stabilizing states, temperature control is performed, so that one of the second temperature sensors 5 can be turned into a stabilized state at a different temperature. When the plural first and second temperature sensors are turned into the temperature stabilizing states again, a step for calculating the temperature change of each of the first temperature sensors 4 is operated to each of the plural second temperature sensors 5. Thus, the inverse matrix of a transmission gain matrix can be prepared.;COPYRIGHT: (C)2001,JPO
机译:解决的问题:获得一种用于在短时间内获得热处理装置中的传输增益矩阵的逆矩阵的方法。 ;解决方案:当将布置在加热源3周围的多个第一温度传感器4和布置在熔炉中的多个第二温度传感器5置于温度稳定状态时,将执行温度控制,以便第二个温度传感器5可以在不同的温度下变成稳定状态。当多个第一和第二温度传感器再次变成温度稳定状态时,对多个第二温度传感器5中的每个操作用于计算每个第一温度传感器4的温度变化的步骤。可以准备一个传输增益矩阵。;版权所有:(C)2001,日本特许厅

著录项

  • 公开/公告号JP4413328B2

    专利类型

  • 公开/公告日2010-02-10

    原文格式PDF

  • 申请/专利权人 株式会社日立国際電気;

    申请/专利号JP19990276787

  • 发明设计人 山口 英人;

    申请日1999-09-29

  • 分类号H01L21/22;G05B11/36;G05D23/19;

  • 国家 JP

  • 入库时间 2022-08-21 18:57:03

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