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Focused element

机译:重点内容

摘要

It is realized a high sensitive solid-state imaging apparatus which corresponds to an optical system having a short focal length (an optical system having a large incident angle ¸). Each pixel (2.8mm square in size) includes a distributed refractive index lens (1), a color filter (2) for green, Al wirings (3), a signal transmitting unit (4), a planarized layer (5), a light-receiving element (Si photodiode) (6), and an Si substrate (7). The concentric circle structure of the distributed index lens is made of four types of materials having different refractive indexes such as TiO 2 (n=2.53), SiN (n=2.53), SiO 2 (n=2.53), and air (n=1.0). In the concentric structure, a radial difference of outer peripheries of adjacent circular light-transmitting films is 100nm. Furthermore, the film thickness is 0.4µm.
机译:实现了与具有短焦距的光学系统(具有大入射角φ的光学系统)相对应的高灵敏度固态成像设备。每个像素(尺寸为2.8平方毫米)包括一个分布式折射率透镜(1),用于绿色的彩色滤光片(2),铝布线(3),信号传输单元(4),平坦化层(5),受光元件(Si光电二极管)(6)和Si基板(7)。分布式折射率透镜的同心圆结构由四种具有不同折射率的材料制成,例如TiO 2(n = 2.53),SiN(n = 2.53),SiO 2(n = 2.53)和空气(n = 1.0)。在同心结构中,相邻的圆形透光膜的外周的径向差为100nm。此外,膜厚度为0.4μm。

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