PROBLEM TO BE SOLVED: To provide an electric contact switching device which improves the reliability of electrical connections.;SOLUTION: The electric contact switching device is provided with a silicon substrate 1 where a groove 2 which is served as a fluid flow passage and a fluid reservoir 3 are formed on one side, a conductive fluid 6 located to move freely inside the groove 2 and the fluid reservoir 3, a glass substrate 7 which is anode-bonded on one side of the silicon substrate 1 so that it may shut up the groove 2 and fluid reservoir 3, and four electric contacts 10a to 10d formed at locations in opposition to the groove 2 on the glass substrate 7. Upon energization, a piezoelectric actuator 8 depresses a diaphragm 4 mounted on the glass substrate 7, causing the conductive fluid 6 inside the groove 2 to be moved. As a result, the contacts 10a to 10d turn off or on through movement of the conductive fluid 6. On the silicon substrate 1, a concave area 20 with a depth, which prevents the conductive fluid 6 from entering into it due to the surface tension force, is formed at many regions including at least a projection range each of the electric contacts 10a to 10d.;COPYRIGHT: (C)2007,JPO&INPIT
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