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The appearance survey instrument, appearance inspection manner and the computer as an appearance survey instrument functioning being the appearance

机译：外观测量仪，外观检查方式以及作为外观测量仪发挥功能的计算机

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摘要

PPROBLEM TO BE SOLVED: To provide a visual inspection device capable of detecting a dent defect on a surface of a substrate, without being erroneously determined. PSOLUTION: A computing part 130 for realizing this visual inspection device for the substrate of the present invention includes a multiresolution image preparing part 131 for generating an image of a plurality of resolutions, a preprocessing part 132 executing predetermined band-path filter processing, a density gradient calculation part 133 for executing Sobel filter processing to generate a density gradient image data, a binarization labeling part 134 for executing labeling processing to specify an area, a feature amount calculation part 135 for calculating a feature amount in the area, a dent defect determination part 136 for determining the presence of the dent defect based on the feature amount, a strength calculation part 137 for calculating strength of the dent defect, and a substrate determination part 139 for determining whether the inspected substrate is required to be corrected or not. PCOPYRIGHT: (C)2006,JPO&NCIPI

机译：

要解决的问题：提供一种视觉检查装置，该视觉检查装置能够检测基板表面上的凹痕缺陷而不会被错误地确定。解决方案：用于实现本发明的用于基板的视觉检查装置的计算部分130包括用于生成多个分辨率的图像的多分辨率图像准备部分131，执行预定的带通滤波器处理的预处理部分132。，用于执行Sobel滤波处理以生成浓度梯度图像数据的浓度梯度计算部133，用于执行标记处理以指定区域的二值化标记部134，用于计算该区域中的特征量的特征量计算部135，凹痕缺陷确定部分136，用于基于特征量确定凹痕缺陷的存在;强度计算部分137，用于计算凹痕缺陷的强度;以及基板确定部分139，用于确定是否需要对检查的基板进行校正或校正。不。

版权：（C）2006，JPO＆NCIPI 展开▼

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公开/公告号JP4550559B2

专利类型
公开/公告日2010-09-22

原文格式PDF
申请/专利权人シャープ株式会社;
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申请/专利号JP20040339156
发明设计人安川実;
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申请日2004-11-24
分类号G01N21/956;G06T1/00;G06T5/20;G06T7/60;
国家 JP
入库时间 2022-08-21 18:59:46

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