首页>
外国专利>
The sample survey instrument and the sample base which can mount the creation mannered
The sample survey instrument and the sample base which can mount the creation mannered
展开▼
机译：可以安装方式简便的样品测量仪器和样品台
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To obtain a clear specimen current image from a specimen current detected by using a plurality of probes without including a difference in amplification rate from an input to an input, thus improving measurement efficiency.;SOLUTION: A plurality of probes are brought into contact with a sample, and while irradiating an electron beam to the sample, a current is measured that flows through the probes, and signals from at least two probes are inputted into a differential amplifier. An output from the differential amplifier is amplified and a specimen current image is created based on the amplified output and the scanning information of the electron beam. The clear specimen current image can be obtained without including a difference in amplification rate between inputs, and thus measurement efficiency in analyzing defects of semiconductor specimens is improved.;COPYRIGHT: (C)2008,JPO&INPIT
展开▼
